Modeling of the microflow senzor

Abstract

The problem of accurate determination of micro mass flow was studied. The measurement of mentioned flow range is becoming more and more important for a lot of applications in the life science, analysis, biotechnologies, synthesis and nanotechnology markets. In this paper a flowmeter design applicable for measurement of low gas flow amounts is presented. To this end, the numeric model of designed flowmeter was made and the flowmeter was numerically simulated using compressible Navier - Stokes equations in two dimensions. The computations were carried out for several types of agitated gases. The results were compared with experimental data.