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Title: | The effect of tip speed in AFM scratching |
Author: | Kudělka, Josef; Martínek, Tomáš; Navrátil, Milan; Křesálek, Vojtěch |
Document type: | Peer-reviewed article (English) |
Source document: | IDT 2016 - Proceedings of the International Conference on Information and Digital Technologies 2016. 2016, p. 160-163 |
ISBN: | 9781467388603 |
DOI: | https://doi.org/10.1109/DT.2016.7557167 |
Abstract: | In this study, we investigated the effect of tip speed in AFM scratching. Three testing patterns were engraved on polycarbonate substrate at different scratching parameters. The subsequent characterization of fabricated structures was performed using the identical atomic force microscope. It was found that the depth and width depend only weakly on tip speed. © 2016 IEEE. |
Full text: | http://ieeexplore.ieee.org/document/7557167/ |
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