Characterization of ultra-thin tungsten layers

Martínek, Tomáš; Kudělka, Josef; Navrátil, Milan; Fořt, Tomáš; Křesálek, Vojtěch

dc.title	Characterization of ultra-thin tungsten layers	en
dc.contributor.author	Martínek, Tomáš
dc.contributor.author	Kudělka, Josef
dc.contributor.author	Navrátil, Milan
dc.contributor.author	Fořt, Tomáš
dc.contributor.author	Křesálek, Vojtěch
dc.relation.ispartof	International Journal of Applied Engineering Research
dc.identifier.issn	0973-4562 Scopus Sources, Sherpa/RoMEO, JCR
dc.date.issued	2016
utb.relation.volume	11
utb.relation.issue	11
dc.citation.spage	7523
dc.citation.epage	7525
dc.type	article
dc.language.iso	en
dc.publisher	Research India Publications
dc.relation.uri	https://www.ripublication.com/Volume/ijaerv11n11.htm
dc.subject	Atomic force microscopy	en
dc.subject	Metrology	en
dc.subject	Nanocharacterization	en
dc.subject	Nanocomposite	en
dc.subject	Surface resistivity	en
dc.subject	Tungsten	en
dc.subject	Ultra-thin film	en
dc.description.abstract	Atomic force microscopy and surface resistivity measurement were used for characterization of ultra-thin tungsten layers deposited on purified silicon with 200 nm thermic silicon dioxide substrate. Radio-frequency magnetron sputtering was used for tungsten deposition. © Research India Publications.	en
utb.faculty	Faculty of Applied Informatics
dc.identifier.uri	http://hdl.handle.net/10563/1007163
utb.identifier.obdid	43875776
utb.identifier.scopus	2-s2.0-85016153536
utb.source	j-scopus
dc.date.accessioned	2017-08-01T08:27:24Z
dc.date.available	2017-08-01T08:27:24Z
dc.rights	Attribution-Noncommercial 2.5 India
dc.rights.uri	https://creativecommons.org/licenses/by-nc/2.5/in/
dc.rights.access	openAccess
utb.contributor.internalauthor	Martínek, Tomáš
utb.contributor.internalauthor	Kudělka, Josef
utb.contributor.internalauthor	Navrátil, Milan
utb.contributor.internalauthor	Křesálek, Vojtěch
utb.fulltext.affiliation	Tomas Martinek 1 , Josef Kudelka 1 , Milan Navratil 1 , Tomas Fort 2 and Vojtech Kresalek 1 1 Tomas Bata University in Zlin, Faculty of Applied Informatics, Department of Electronics and Measurement, Nad Stranemi 4511, 760 05 Zlin, Czech Republic. 2 Institute of Scientific Instruments ASCR, Kralovopolska 147, 612 64 Brno, Czech Republic.
utb.fulltext.sponsorship	This project was performed with financial support by the Ministry of Education, Youth and Sports of the Czech Republic within the National Sustainability Programme project No. LO1030 (MSMT-7778/2014) and with support by the Internal Grant Agency of Tomas Bata University under the project IGA/CebiaTech/2016/003 and by Ministry of Education, Youth and Sports of the Czech Republic (project LO1212). The research infrastructure was funded by Ministry of Education, Youth and Sports of the Czech Republic and European Commission (project CZ.1.05/2.1.00/01.0017) and by The Czech Academy of Sciences (project RVO:68081731).