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| Hiding E-beam exposure fields by deterministic aperiodic 2D patterning | 897 |
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| September 2025 | October 2025 | November 2025 | December 2025 | January 2026 | February 2026 | March 2026 | |
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| Hiding E-beam exposure fields by deterministic aperiodic 2D patterning | 24 | 7 | 13 | 13 | 8 | 7 | 0 |
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