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| Hiding E-beam exposure fields by deterministic aperiodic 2D patterning | 755 |
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| May 2024 | June 2024 | July 2024 | August 2024 | September 2024 | October 2024 | November 2024 | |
|---|---|---|---|---|---|---|---|
| Hiding E-beam exposure fields by deterministic aperiodic 2D patterning | 6 | 3 | 5 | 2 | 8 | 6 | 3 |
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| Fulltext_1008429.pdf | 2 |
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